Research On Compensation Of Vibration Coupling Error Of XY? Motion Platform

In recent years,with the improvement of microelectronic packaging technology requirements and the continuous update of high-tech,the traditional microelectronic manufacturing packaging equipment technology is facing a great challenge.At the same time,the improvement of packaging technology requirements has a severe test on the dynamic and static stability and accuracy of packaging equipment under high dynamic conditions.In this thesis,the XY? motion platform based on macro micro composite motion mode is built to solve the related problems in the research of motion platform system.In this thesis,the overall structure of the motion platform is analyzed,including the dynamic analysis of the motion platform,the research of vibration coupling decoupling method,etc.Based on the related analysis and research of the platform,this thesis proposes the vibration coupling decoupling control method in the process of platform motion,and designs the integrated software system of XY? motion platform.Based on the above motion platform system,the stability of the motion platform is verified.The main contents of this thesis are as follows:1.This thesis analyzes the background and significance of precise motion positioning platform in the research project,and investigates the development of motion positioning platform system and system control methods at home and abroad in recent years.Through the analysis of the key technologies and difficulties of the motion positioning platform system to determine the focus of this thesis and research program.2.The modal analysis and error source analysis of XY? motion platform are carried out from the point of view of error source under dynamic condition.Determine the overall structure design and hardware selection of macro motion platform and micro motion platform.Using Solid Works 3D modeling software to establish the macro platform model,and using MATLAB Simulink to carry out modal analysis and response frequency analysis,so as to get the vibration coupling error source of the motion positioning platform.3.From the point of view of dynamics,the displacement coupling relationship between x-axis and y-axis linear motors of the moving platform is studied.The influence of displacement coupling on the displacement of moving platform is analyzed.The system dynamics model and its hybrid dynamics model are established for the x-axis and y-axis respectively.By combining the specific parameters of the motor,the mechanical and electrical mathematical models of the moving platform under the x-axis and y-axis single input motion state,and the mechanical and electrical mathematical models of the moving platform under the mixed input motion state are established.4.Compensation and Simulation of vibration coupling error of moving platform.Carry out the research on the control method of the motion platform system.In this thesis,the traditional PID controller is used to study the compensation method of vibration coupling error in the process of moving platform system.At the same time,diagonal matrix,feedforward decoupling and neural network decoupling control methods are studied.Finally,the performance of each algorithm is compared by simulation,which verifies that the proposed method has a good inhibition effect on the vibration coupling of the moving platform.5.The XY ? motion experiment platform is designed,and the system software is designed.Based on the designed software and experimental system,the performance of the platform is tested and analyzed,and the vibration coupling error compensation method proposed in this thesis is verified.