Research On Key Technologies Of Miniaturization And Integration Of Nitrogen Vacancy Atomic Spin Sensors

Integration and chipization are the future development trends of sensor devices.The solid-state atomic devices with the nitrogen-vacancy(NV)spin structure as the sensitive core has unique advantages in room temperature control and all-solid-state integrated manufacturing,and become one of the most potential engineering applications in the field of quantum sensing and precision measurement.In this paper,relevant research work is carried out on the key technologies of the miniaturization and integration of the diamond nitrogen vacancy atomic spin sensor.Focusing on the requirements of excitation,fluorescence collection,microwave drive and information calculation of nitrogen vacancy spin structure,the miniaturization technology of key modules is studied and the system integration is completed.In this paper,the sensing applications and miniaturization integration of diamond NV color center in magnetic field,temperature field,stress measurement and accelerometer are introduced.Then based on the energy level structure of diamond NV color center and spin resonance sensing mechanism,combined with optical detection magnetic resonance technology,the spin magnetic resonance effect and fluorescence signal collection technology and theory are introduced..Then,aiming at the miniaturization of the device,the preparation method of NV color center is introduced,and then an integrated optical structure is designed for the efficient collection of fluorescence signal containing sensing information,which can achieve about65.33%of the fluorescence collection efficiency.Meanwhile,a dual?type antenna is designed,which can provide a uniform microwave intensity distribution field with a volume of 304 mm³,and increase the contrast of the diamond NV color center by 4.89 times compared with the traditional single copper wire antenna.Finally,in the package size of 4 cm×4 cm×9 cm,the overall integration of miniaturized devices including laser light source,diamond,integrated optical path structure,microwave antenna,and photoelectric detection module is realized.Only external power supply and input microwave signal,it can output NV color center ODMR signal.Finally,the method to solve the sensing information of microwave modulation and demodulation used for real-time reading and decoding of sensing signal is introduced,the optimal modulation parameters and the optimal PID parameters are given,and the optimal values are determined.The miniaturized device was tested by temperature sensing and magnetic sensing.The measured sensitivity of the temperature sensor is-98.5 k Hz/K,and the linearity is good.The measured sensitivity of the magnetic sensor is 0.09 m V/n T,the shot noise limit is 0.8 n T/Hz^1/2,and the magnitude and direction of the magnetic field can be identified effectively.In this paper,the key technologies of miniaturization and integration of nitrogen vacancy atomic spin sensors are explored,and the miniaturization and integration of general devices for diamond NV color center sensing front end are realized.It can be combined with different structures and information solution systems to realize the sensing measurement of different physical fields,which will help to promote the engineering application of diamond NV color center solid state atomic spin sensor devices.