Fabrication And Characterization Of Carbon Nanotube Electronics Based On Photosensitive Dry Film

Since their discovery,carbon nanotubes have attracted great attention in flexible electronics including thin-film transistors and integrated circuits due to the outstanding optical,electrical and mechanical properties.In the past decade,researchers conducted extensive effort on the applications of flexible carbon nanotube thin-film transistor devices in integrated circuits,active matrix displays and sensorsand so on,which effectively promoted the application of CNT TFTs in the field of flexible electronic devices.However,during the patterning process of photolithography,the liquid photoresists are necessary to be spin-coated on the target substrate.Therefore,the device dimensions are directly limited by the scale of spin-coated photoresist films,which becomes the major bottleneck of the further development for largescale flexible CNT-based electronics.Here,we report a facile and effective technique for high-throughput fabrication of flexible all-CNT electronics using a photosensitive dry film instead of traditional liquid photoresists.A 10-inch photosensitive dry film can be efficiently laminated onto a flexible substrate by a rollto-roll technology,and a 5-?m patterning resolution of CNT films has been achieved for the construction of flexible and transparent all-CNT thin-film transistors and integrated circuits.The all-CNT TFTs fabricated by our technology exhibit electrical performances including an on-off current ratio of>105,a carrer mobility of 33 cm2V-1s-1 and a small hysteresis of 4 V.The standard deviations of on-current and mobility are respectively 5 and 2%of the average value,demonstrating an excellent reproducibility and uniformity of device property,which allow us to construct a large noise margin inverter circuit with a voltage gain of 30.Our study indicates that the photosensitive dry film is very promising for low-cost,fast,reliable and scalable fabrication of flexible and transparent CNT-based integrated circuits,and opens up opportunities for future high-throughput CNT-based printed electronics.