Optimal Design Of Three-axis High-g Accelerometer And Its Application In Multi-layer Hard Target Penetration

Three-axis high g-value acceleration sensor plays an important role in the penetration of hard targets,which provides an important basis for fuze to realize the level and attitude recognition.In this paper,by referring to the development of high g-value acceleration sensor abroad the world,the three-axis sensor sensitive chip is optimized by the research method of theoretical analysis and simulation,and its specific application and application are discussed The main research contents are as follows:1.Extensive review of domestic and foreign data,analysis of the basic structure and working principle of the sensor's sensitive unit,and the optimization direction is given,that is,focusing on the two main indicators of the natural frequency and sensitivity of the sensitive unit,studying the two indicators and sensitivity The relationship between various parameters of the chip and optimize it.2.Through ANSYS finite element software,the sensor X,Y,and Z three-axis sensitive elements are optimized and simulated.For X(Y)-axis sensitive elements,the effects of various parameter dimensions(overall size ratio,mass length and width,main structure thickness,support beam width,and micro beam size)on the natural frequency and sensitivity of the sensitive elements are studied and summarized the Law of change.Finally,the specific parameters were determined,so that the natural frequency of the simulation results reached2.12 MHz,and the sensitivity reached 0.6825?V/g@5V.For the Z-axis sensitive unit,it was improved by designing two grooves at both ends of the support beam The performance makes its natural frequency reach 585.2 KHz,and the sensitivity reaches 0.7356?V/g@5V.3.The LS-DYNA software is used to simulate the penetration process,and the velocity and acceleration curves in the process of penetrating the multi-layer target plate with positive and certain angle of inclination are obtained,and the general change rules are summarized.Based on the acceleration and velocity signals,the trajectory equation of projectile penetration motion is given,which provides the basis for Fuze layer measurement and obstacle identification.At the same time,it analyzes the acceleration signal characteristics of the acceleration sensor in practical application,the error source and error size are analyzed,and gives suggestions for the processing and installation of the sensor.4.The processing technology of the high-g acceleration sensor was researched and a prototype prototype was made.Use the Hopkinson rod to calibrate the sensor.Under 5V supply voltage,the test results showed that the sensitivity of the X,Y,and Z axes were0.535?V/g and 0.521?V/g,0.531?V/g,the non-linearity errors are 1.58%,2.36%,1.46%,and the maximum lateral sensitivity is 8.62%,8.40%,3.92%.