Design And Experiment Of Quadrature Error Correction System For MEMS Ring Gyroscope

In recent years,the micro-electromechanical system which is developed from microelectronic technology（semiconductor manufacturing technology）has gradually become the focus of research in various countries.Micro inertial navigation system based on MEMS technology has been widely used in all aspects of military and civil fields.Among them,MEMS gyroscope is the core device of micro inertial navigation system,and its performance directly determines the overall performance of micro inertial navigation system.High-precision MEMS gyroscope is an indispensable part of high-precision weapons such as artillery,torpedo and precision guided missile.Due to the limitation of technology level,the quadrature error caused by the structural processing error in gyroscope processing is the main factor that degrades the performance of gyroscope.Therefore,quadrature error correction is an important means to improve the performance of gyroscope.It is of great significance to develop high-precision MEMS gyroscope through quadrature error correction for the improvement of Chinese national defense science and technology level.In this paper,the S-beam MEMS ring gyroscope designed by our research group is taken as the research object,and the quadrature error correction technology is studied and the corresponding quadrature error correction system is designed for testing.The main work and innovations are as follows:Firstly,the research status of MEMS gyroscope and quadrature correction technology is described.Then,the structure and working principle of MEMS ring gyroscope studied in this paper are introduced.Then,the control scheme of closed-loop driving based on AGC and open-loop detection of ring gyroscope is established.Then,the causes,output signals and correction principles of the quadrature error of the ring gyroscope are analyzed,the quadrature error correction system of the ring gyroscope is designed,and the correction system model is simulated.Finally,the performance parameters of ring gyroscope before and after quadrature error correction are tested by experiments.Test data show that the amplitude of the detected displacement signal of the ring gyroscope after the quadrature error correction is reduced from 272 m V to 88 m V,which shows that the quadrature error is almost completely eliminated.The scale factor changed from 10.23 m V/°/s to 10.15 m V/°/s,which was basically unchanged.Zero bias and zero bias stability changed from-10.52°/s and 15.89°/h to-2.62°/s and 1.37°/h,which were increased by about 3 times and 10.6 times respectively.The experimental results meet the expectation,which shows that the quadrature error correction system designed in this paper can greatly improve the performance of the ring gyroscope.