| Based on the development of the single mass silicon micro-gyroscope,the dual mass structure inherits the advantages of high reliability, low power consumption, fast response, low cost,moreover,due to the symmetric feature of the structure,the dual mass structure have a high antiinterference ability. Therefore, the dual mass structure gets a broad application prospects in the military and civilian two important areas. Although,the dual mass strcutre performance improved greatly as the in-depth technology research,being limited by the defects of structure design, the fabrication technology,environmental fluctuations and the technology of interface circuits, the performance of the structure can not sufficient for the requirements of high-precision.A fully decoupled dual mass silicon micro-gyroscope is studied in this paper.Based on the dynamic study of the dual mass structure, the micro-mechanical structure design principle and the basic algorithms of the peripheral control circuit, combined with computer simulation technology, aiming at the quardrature error and rotation error of the structure. A new tuning fork fully decoupled dual mass structure was design in this dissertation. The specific contents of this paper are summarized below:1)Theoretical analysis of the tuning fork dual mass structureFirst,simplify the model of dual mass structure,based on the theory of single mass structure and combined with Coriolis effect to analysis the motion equation of the dual mass structure and to establish the dynamics model of dual mass structure.Then, as the dual mass structure design requairment, the vibration mode, gas damping and driving and sensing theory were analysised in this paper.2)Design and simulation of the the tuning fork dual mass structureFirst,roughly setted the form of the tuning fork dual mass micro-gyroscope by selectting the main components. Then stablished the FEM model of the dual mass structure,analysis the quardrature error and rotation error and the souces of these errors and then improve the components of the dual mass structure with innovation,for example,the drive decoupling beam replaced by a straight beam.So,the coupling error and the rotation error were greatly depressed.At last, the modal simulation, the thermal stress simulation,the harmonic simulation, and the transient shock simulation are implemented by ANSYS to verify the feasibility of the new dual mass structure.3) Error analysis of the tuning fork dual mass structureAnalysis the error source and the error influencment of the optimize tuning fork dual mass micro-gyroscope through the theoretical analysis, the analysis of mechanical model and error analysis of the FEM simulation.Involving the principle error, structural design error, processing error and temperature performence.4) Test of the tuning fork dual mass structureCombined with the interface drive closed loop, sense closed loop and quardrature correction circuits,test the packaging dual mass structure’s scale factors, zero bias, zero bias stability, threshold, resolution and temperature performance,to further validation the optimize tuning fork dual mass micro-gyroscope performance. |
