Research On Evaluation Method Of Energy-saving Operation Of Clean Air Conditioning System In Chip Factory

With the rapid development of 5G and AI,the chip semiconductor industry continues to rise,and the domestic chip market and demand are rapidly expanding.However,due to my country’s low chip self-sufficiency rate and US sanctions on my country’s chip manufacturing technology,my country’s chip semiconductor localization is imminent.What follows is the increase in production capacity and construction of more chip clean workshops,which means a huge increase in energy consumption.The energy consumption of air conditioning in clean workshops is several times that of conventional public buildings.The current domestic energy consumption for such buildings is The evaluation method of energy-saving and energy-saving operation is in a blank stage.Therefore,studying the energy-saving operation evaluation of the air-conditioning system of the chip clean workshop is of great significance for guiding and restraining the energy consumption level of the industry,the benchmarking of enterprise energy consumption,and energy-saving diagnosis and transformation.This article first conducted a year-consuming field test and survey on chip companies in 4 regions in China,and a total of 6 clean plants.The detailed analysis of energy consumption level,cooling station energy efficiency,cooling machine energy efficiency,cooling station energy efficiency,wind There are six aspects of system energy efficiency and load level,which clarify the current operating status and common problems of the air-conditioning system in various clean-level chip factories in my country.According to the actual survey,the total power consumption of the chip clean plant is about 30-40% of the total power consumption of the air-conditioning system,the cooling station accounts for about 40-60% of the total air-conditioning power consumption,and the air system accounts for 20-40%;Most cold stations still have a large energy-saving space;there is a general phenomenon of over-guaranteed in the clean room of the chip clean plant,and the closer the air exchange frequency is to the design value,the lower the air system transmission and distribution efficiency;the unit air volume fan power SFP and cleanliness level are not The direct relationship is between 0.64—1.48 k J/m3;the load level of clean rooms of the same level increases with the increase of production intensity,and the load level per unit area of clean rooms of different levels(ISO4—ISO8)is between 149-2300 W/m2,The unit air volume load level is between 11.27-22.8k J/m3.The average reheat rate accounts for 15.1% of the total cooling capacity,and the energysaving benefits of removing the offset of cold and heat are obvious.Subsequently,the designbuilder software was used to analyze the significance of the factors affecting the energy consumption of the air-conditioning system of the chip factory based on simulation.In the multi-factor analysis of variance,when α=0.05,the number of air changes and the COP of the cooling machine are significant,and the total value of the influence factor F of the wind system accounts for 70%.The water system influence factors accounted for 23%,indicating that the wind system is the key to energy saving.Then,combined with the previous analysis of energy consumption factors and actual measurement analysis,it is found that the dispersion of the unit area index is higher than the unit clean air volume index.Therefore,new evaluation indicators are proposed based on the unit clean air volume index: annual power consumption per unit clean air volume/air conditioning power consumption(EIUA/PIUA),cooling volume per unit clean air volume/reheat(SCD/SRD),and heat source consumption per unit clean air volume Power(SRP),unit clean air volume cooling load deviation rate ω＿scl.Furthermore,comprehensively selected and proposed evaluation indicators form a hierarchical evaluation indicator system,and provide reference scales and control limits for some indicators based on the current measured data,forming a complete set of energysaving evaluation of the clean air-conditioning system of the chip workshop method.The evaluation method in this article can guide and constrain the energy consumption level of the industry,help enterprises to benchmark energy consumption,as well as enterprises’ own energy-saving diagnosis and energy-saving potential mining.Finally,the application of the monitoring system and operation management model based on the evaluation index system is described,and the key monitoring nodes in the chip clean plant monitoring system are proposed.