Research And Development Of High Temperature Pyrolizer

The development of vacuum coating technology promotes the rapid research and development of new materials.Thin film growth includes physical vapor deposition and chemical vapor deposition,in which the physical vapor deposition method is mainly used to vaporize raw materials by heating them at high temperature.High-temperature cracking furnace is a kind of evaporation source,which is used to vaporize substances that are easy to form clusters under high vapor pressure,such As As,Sb,Se,Te,Sn,etc.These materials are the raw materials for the preparation of color light source,mainly used to make light-emitting diodes.The existing evaporation source equipment in China is easy to form clusters when evaporating such materials after a single heating,which cannot meet the demand of high-performance film growth.Based on this,this paper research and development of high temperature cracking furnace is mainly used in the molecular beam epitaxy thin film growth,the thin film growth process is of high purity solid in a cracking furnace in the crucible,after two heated(first to evaporate,the second cracking)form a certain beam density of molecules(or atoms)beam,under the condition of high vacuum by the nozzle to the substrate,on the surface of substrate to form a thin film epitaxial growth,cracking furnace with multiple evaporation source device can also be used together.In this paper,the research and development process of high temperature cracking furnace and the working principle of equipment are introduced in detail.Through theoretical calculation and simulation analysis to confirm the relevant parameters of the core components of the hightemperature cracking furnace,further complete the basic structure of the cracking furnace,draw the three-dimensional model and two-dimensional diagram of the parts of the cracking furnace,and the parts of the processing and processing,and finally complete the assembly of the parts of the cracking furnace.Through the establishment of the experimental platform for the actual test,through the data sorting and analysis to determine the final product indicators fully meet the requirements of the design before the experiment.The successful development of high temperature cracking furnace makes the evaporation source equipment in vacuum field more perfect in China.