Performance Measurement Method And System Realization Of Dry Vacuum Pump Under The Condition Of Large Flow Rate

As the key equipment to obtain clean vacuum environment,dry vacuum pump has many advantages such as high reliability,low maintenance cost and low noise.With the continuous development and improvement of strategic emerging industries and innovation driven industries such as aerospace,semiconductor chips,biomedical,solar photovoltaic,liquid crystal injection,chemical and pharmaceutical industries,dry vacuum pump plays a more and more important role in these industries The more important the role.At the same time,with the development of these industries,the demand for dry vacuum pump is gradually increasing.This puts forward higher requirements for the theoretical design,performance index and test accuracy of the dry vacuum pump.In terms of vacuum pump test,most of the existing vacuum pump tests in China are scattered in measurement,with single test parameters,and only the whole pump can be tested.Most of the tests also use manual operation and reading,which results in poor measurement accuracy and narrow measurement range.Most of the vacuum pump tests are only applied to the inspection of the pump’s factory products.Now,the vacuum pump test is turning to the demand of multi parameter integrated measurement,automatic test,wide measurement range and high measurement accuracy,which provides data support for the dry pump structure design.In view of the above problems and needs,this paper selects the research method of dry vacuum pump performance measurement under the condition of large flow rate,and builds a composite dry pump pumping theory verification test system.In the theoretical design of the pump,a large flow performance test method is proposed to meet the demand of large flow test.It can test the single-stage pump,support the rotor parametric design,and provide data support for the reform design of vacuum pump and the research and development of domestic vacuum pump.In the aspect of test requirements,design a theoretical verification platform for dry pump pumping,establish an integrated,automatic and high-precision wide range dry pump test system,and simulate the actual working conditions to measure the performance parameters of dry pump when pumping high-temperature gas.In this paper,the pressure,flow,temperature,speed and other parameters are taken as the main experimental parameters,the specific parameters are adjusted quantitatively,the changes of other parameters are measured,and then the performance parameters of dry vacuum pump under different conditions are measured,which provides experimental support for the theoretical design of vacuum pump.Firstly,the scheme and structure design of the dry pumping theory verification platform is carried out with reference to the domestic and foreign vacuum pump measurement technical standards and relevant literature;secondly,the pressure measurement module is designed and studied,and the fluent is used to simulate the pressure measurement point and the actual pump inlet pressure,and the verification test is set to analyze the accuracy of the pressure measurement point to measure the pump inlet pressure;then the flow measurement module and the large The flow gas measurement method is studied and analyzed,and a flow measurement structure with buffer chamber and balance chamber installed before and after the flowmeter is proposed to ensure the range and accuracy of flow measurement;then the temperature control measurement module is studied and the temperature field of the extraction speed test hood is simulated and verified to ensure that the heating module in the hood heats the incoming gas evenly and can simulate the actual working conditions Finally,the uncertainty of the platform is analyzed to ensure the accuracy of measurement.In conclusion,the paper puts forward a large flow test method of dry vacuum pump,designs and builds a theoretical verification platform for dry pump pumping,which meets the requirements of wide range,high-precision design index and integration,automation and highprecision test,fills in the blank of accurate measurement of large flow dry vacuum pump pumping speed,and provides experimental data support for its theoretical design.