| In recent years,with the vigorous development of the integrated circuit industry,optical components industry,film industry,pharmaceutical industry,chemical industry and other industries,dry vacuum pump(vacuum dry pump,referred to as dry pump)is faced with an unprecedented development opportunity.A large integrated circuit manufacturer of a production line put into operation,often need thousands of dry pumps.As the positive guidance of state in the field of integrated circuit equipment,the domestic dry pump manufacturers is meeting with an important development opportunity,experiencing "from scratch"and "from being to reliable",Currently developing towards "more energy,more efficient" direction.traditional dry pump measurement devices usually only perform single performance measurements under fixed conditions.Based on this background,this paper presents a performance measurement method with highly integrated,high precision and high degree of automation for vacuum dry pump.In this paper,not only the measurement of the original performance indicators,but also through the simulation of dry vacuum pump in different operating conditions,directly measurement main performance in the process of real-time operation.Fully considering the integrated performance measurement method of the measurement object diversity,analyze and improve the structure of the object,put forward the integrated performance measurement method of a variety of functions.To realize the integrated measurement method,choose three basic physical quantities of flow,vacuum degree,temperature to measurement and control,for the integrated performance measurement method of dry vacuum pump provides a theoretical basis and the concrete scheme.By calculating and comparing the basic principles of various flow measurement methods and the uncertainty,select a measurement method suitable for the integrated measurement system;By contrast to the principle of vacuum measurement and classification,determine the vacuum gauge options;Through the study in combination with the need of integration measurement temperature measuring method,choose the appropriate temperature measuring device.After determine the goal and function of the integrated measurement system,further put forward the integrated measurement system platform of the overall solution.Through investigation and research in the existing literature,to design and calculate and determine the type and size of the vacuum chamber,optimize the internal structure of the vacuum chamber design and implement the uniformity of temperature and vacuum degree.At the same time,by the positive pressure balance method and in combination with mass flowmeter and vortex flowmeter and set the balance chamber,the method of implementation under vacuum conditions in wide range,the precise measurement of the small flow rate.According to the different inlet pressure outlet pressure and inlet flow rate and the specific measurement process under different temperature conditions,set technology,analysis as well as the factors that influence the accuracy of measurement uncertainty for the further experimental platform construction to create conditions.On the basis of the measurement scheme,research the realization of the integrated control system,focusing on physical quantities,such as temperature,pressure,flow rate for on-line monitoring and closed-loop control technology research.Through the design of configuration program development and monitoring interface,research the real-time monitoring method of integrated measurement system.By means of the integrated supervisory control and data post-processing of each execution unit,and adjust the condition of a given input,including gas flow rate,temperature,pressure and speed conditions,the integrated measurement system of the real-time process data,including vacuum pumps,valves,controllers,and so on various components of running state,as well as the gas flow rate,pumping speed,vacuum degree,rotational speed and power parameters,operation process parameters,such as temperature,operation efficiency and compression ratio.In this paper,the integrated performance measurement method of the dry vacuum pump,by the simulation of extraction process,realize the constant temperature,constant pressure,constant flow and speed adjustable theory verification measurement,the structure design and the extraction process of dry pump can be multi-dimensional experiment.Through further research,direct on-line testing of multiple intermediate parameters can be realized,which has important application value and guiding significance for grasping the variation rule of vacuum performance of vacuum dry pump,and validating and optimizing theoretical system of dry vacuum pump. |
