| Structured illumination microscopy(SIM)mainly use structured light to modulate the measured surface,then demodulate the three-dimensional information of the measured surface based on section and peak extraction algorithms.This paper studies the SIM surface measurement 3D reconstruction algorithm and software.The main research contents and results are as follows:The research proposes a SIM axial response curve acquisition algorithm that incorporates the focus evaluation operator.This algorithm utilizes the applicability of the focus evaluation operator to inclined large surfaces.The sectioned algorithm and the focus evaluation operator simultaneously process each layer of images to obtain the SIM axial response curve and the focus axial response curve.Based on the established signal-to-noise ratio model and fusion strategy,the two are processed to obtain the reconstructed axial response curve.Through this algorithm,the adaptability of the SIM to the tilt of the surface is effectively increased,and the scope of application of the structured light illumination microscope is increased.The research proposes a linear Gaussian fitting peak extraction algorithm and a weighted Gaussian fitting peak extraction algorithm.Aiming at the problem of non-linear iteration and low calculation efficiency of traditional Gaussian fitting peak extraction algorithm,the nonlinear Gaussian fitting algorithm is converted into linear Gaussian fitting algorithm to effectively improve the operation efficiency;for the noise problem,weighted Gaussian fitting is proposed.This algorithm effectively suppresses the influence of noise and improves the measurement accuracy.On the basis of the above algorithm research,a software system integrated with the optical-mechanical hardware system of the structured light microscope was developed,and experimental tests were performed to obtain good characteristics verification. |