Study On Electro-explosive Performance Of MEMS Explosive Converter

The explosive transducer refers to the thin film transducer applied in the explosive foil initiation system.As the core component of MEMS pyrotechnics,the thin film transducer is the determinant of the safety and reliability of MEMS pyrotechnics components.In order to continuously improve the research theory of MEMS explosive micro structure thin film energy exchanger,combined with the development achievements of the energy exchanger in recent years,this paper focuses on introducing the influencing factors of the electro-explosive performance of the thin film energy exchanger,the design and preparation process of the energy exchanger and the electro-explosive performance test system of the energy exchanger.In this paper,COMSOL software was used to conduct electrothermal simulation on the foil material and the structure of the bridge area to analyze the influence of the change of the properties of the film converter on its electro-explosive performance.At the same time,the circuit parameters of the test system were simulated,and the influence of the change of circuit inductance,resistance and capacitance on the electrical explosion performance was analyzed.A test prototype was set up for experimental verification,and the performance test of electric burst of thin film converter was carried out.Through the electrothermal simulation of the bridge structure and materials,the voltammetry characteristic curve is obtained by the test system.It is concluded that the bridge structure can affect the electro-explosive performance of the thin film transducer,and the electro-explosive performance of different bridge structures varies greatly.It is found that the electrical explosion performance of inverted V bridge area is excellent,which can increase the energy output in the electrical explosion process,reduce the energy loss in the test loop,and accelerate the initiation response speed,which is in line with the development trend of the new era of thin film energy converter.Among the three metal bridge foils,aluminum and copper bridge foils have excellent electro-explosive performance,followed by gold bridge foils.Moreover,aluminum-copper composite film energy converter can significantly increase the output energy of electric explosion and improve the energy utilization rate in the process of electric explosion.It is found that the change of circuit parameters（inductance,resistance and capacitance）affects the electro-explosive performance of the thin film converter.The influence of charging voltage and bridge area size on the electro-explosive performance was explored through experiments.Under the premise of ensuring the stable operation of the test system,the charging voltage of the test system was appropriately increased to obtain better electro-explosive performance of the thin film converter,and the energy utilization rate of the test system should also be considered.At the same time,when the size of the bridge area of the membrane converter is 200-300 μm,the excellent electric burst characteristics can be guaranteed.