| With the rapid development of science and technology,the living standard of human beings has changed greatly.The demand for real-time human health monitoring is growing rapidly.In recent years,researchers have done a lot of research on wearable sensors and implantable devices.As a new two-dimensional material,graphene has attracted a lot of attention in the field of sensor research all over the world because of its advantages in mechanics,heat and electricity Another two-dimensional material,MXene,has good hydrophilicity,conductivity,stability and mechanical properties because of the functional groups suspended on its surface.Because of its unique structure and excellent performance,MXene has good application prospects in the production of supercapacitors,pressure sensors,photocatalysis and so on.In view of the above background,this paper has carried out a series of research on flexible pressure sensor,including sensor device manufacturing,test system manufacturing and so on.The first chapter introduces the research background and significance of this paper,describes the structural characteristics of graphene and the research status at home and abroad,as well as the structural characteristics and application scenarios of two-dimensional material MXene,introduces the types of common pressure sensors according to the sensing mechanism of pressure sensors,and finally describes the main research content of this paper.The second chapter introduces the experimental part of the flexible pressure sensor.Firstly,the materials and instruments needed in the experiment are introduced,then the characterization methods used in the experiment materials are explained,and the performance test methods or systems are described.In chapter three,a flexible pressure sensor based on laser engraving reduction of graphene oxide is designed and fabricated.Firstly,the graphene material was studied,and its morphology and structure were analyzed.Then,the preparation method of laser carving reduced graphene oxide flexible pressure sensor was introduced.This sensor has good performance in the low pressure range,with a sensitivity of 1.7 kpa-1,and can detect pulse,sound and other limb activities in real time.In chapter four,a flexible pressure sensor based on laser engraving reduced graphene oxide/MXene is designed and fabricated.Firstly,the laser engraving reduced graphene oxide and MXene composite electrode are introduced,and its structure is analyzed.Then,the design and preparation method of laser engraving reduced graphene oxide/MXene flexible pressure sensor are introduced.Finally,the performance and application tests are carried out.The sensitivity of this kind of sensor is higher than that of using only laser engraving reduced graphene oxide as conductive material.The sensitivity of the sensor is 2.25 kpa-1 in the low pressure range.In addition,a 4×4 pressure sensor array is designed to show the possibility of large-scale integration.The fifth chapter is the summary and prospect of this paper. |