Study On Theory And Experimental Study Of Ultrasonic Vibration Assisted Laser Drilling

Laser processing is a non-contact processing method,so laser drilling has many outstanding advantages over other micro-hole processing methods.In order to improve the processing quality of laser drilling,in recent years,there have been researches on ultrasonic vibration assisted laser drilling,and ultrasonic vibration assisted laser drilling can be divided into ultrasonic vibration workpiece and ultrasonic vibration lens.The basic theory,numerical simulation and design of experimental and experimental equipment for lens-assisted laser drilling have been studied.The details are as follows:(1)The theory of laser drilling and ultrasonic vibration assisted laser drilling is studied.The Gaussian beam characteristics,processing theory and simple hole forming formula of laser drilling are studied.The reasons for the influence of ultrasonic vibration assisted intervention on the quality and efficiency of laser drilling are explained from the perspectives of qualitative analysis and mechanism analysis.Two methods of ultrasonic vibration assisted laser drilling are introduced,and the reason why ultrasonic vibration lens assisted laser drilling is selected as the research scheme is explained.(2)Applying the theoretical knowledge of laser and ultrasonic vibration to simplify the actual model of ultrasonic vibration lens assisted laser drilling,and establish and derive the mathematical model of the analytical solution of the variation of the spot radius of the laser beam incident on the surface of the workpiece by the ultrasonic vibration lens,effectively explain The main reason for the influence of ultrasonic vibration intervention on laser drilling.(3)Based on the basic theory of transient thermal analysis,the multiphysics connection analysis software COMSOL was used to simulate and predict the removal process of the laser-assisted laser drilling experiment with or without ultrasonic vibration lens.The simulation results are compared with the experimental results,and the rationality of the simulation model is verified.At the same time,the influence of ultrasonic vibration intervention on the hole depth of laser drilling is obtained.(4)In order to meet the experimental requirements of ultrasonic vibration lens assisted laser drilling,an ultrasonic vibration experimental platform was built.The design of the structure of the ultrasonic vibration lens-assisted laser drilling device and the design calculation and modal analysis of the ultrasonic horn are mainly completed.According to the actual working conditions,under the premise of ensuring the structural rationality and considering the difficulty of manufacturing and assembly implementation,the final plan is determined,and the designed device is manufactured and installed on the existing laser equipment for debugging and experiment.(5)Based on the existing laser equipment,the ultrasonic vibration lens auxiliary device designed is installed.Taking 304 steel as the research object,the main experiment was carried out with or without ultrasonic vibration assisted laser drilling.The key parameters such as defocus amount,laser power,drilling time and ultrasonic amplitude were tested by single factor and repeated verification analysis.The influence of ultrasonic vibration on the quality parameters of laser drilling is obtained through analysis.