Mechanism Research And Modeling Verification Of A New Type Of Light-Controlled Electrostatic Protection Device

In the electronic technology industry,electrostatic discharge(ESD)has become the main cause of integrated circuit(IC)failure.As the threat posed by static electricity is very serious,the industry has raised the research of ESD physical mechanism and the design of new device models to a strategic height.However,the performance and ESD design window of traditional ESD protection devices designed for specific scenarios are fixed only for specific functional circuits under the single control condition of the electric field.Therefore,the study of electrostatic protection devices that can be used in multiple scenarios under different control methods(such as light waves)is of great significance for improving circuit utilization and reducing device development time.This thesis explores the protection characteristics of electrostatic devices under the new control method from the perspective of device designers.On the basis of optoelectronic devices and ESD protection mechanism,a new type of ESD protection device with light adjustment ESD design window was designed using existing EDA tools.The thesis aims to study the principles,electrical characteristics and models of lightcontrolled devices,and based on the 0.18?m BCD process,a prototype device of light-controlled electrostatic protection devices under silicon is realized.The macroscopic model of the silicon controlled rectifier(SCR)of the optical control device and the transient voltage overshoot model for device-level simulation were established.The test data confirmed the theoretical analysis and verified the simulation results.The thesis finally analyzed the transmission line pulse(TLP),parasitic capacitance,and DC test results of the device with and without light.The main research content and corresponding conclusions of this thesis are as follows:1.A new control method is established to increase the holding window of the bidirectional gate ESD device.Based on the basic principles of SCR devices,through equivalent circuit and TCAD simulation analysis,it is verified that the photo-generated current converges to the intrinsic PNPN path to form the positive feedback ESD discharge current of the device.Compared with dark conditions,the holding current under light has a significant increase,achieving the function of regulating the holding window.2.Simulation analysis and actual measurement of the electrical characteristics of the new optical control device.Use simulation software to establish the device structure of the light-controlled bidirectional gate SCR,and apply current pulses to simulate ESD impact for simulation verification.According to the internal temperature of the device,the electric field density and the formation of the current path,the structural parameters of the optimized device are adjusted to guide the actual tape out of the device.The device test platform was built,and the measurement results of the device under no light conditions and under light conditions were compared.The results show that the quality factor of the device under light is increased from 0.246 to 0.262.3.A macroscopic model of light-controlled ESD devices under electrostatic stress is established.The TLP model built in Verilog language effectively simulates the physical effects and hysteresis characteristics of the light-controlled ESD structure,and also bypasses the convergence problem caused by avalanche breakdown.The thesis established a transient overshoot voltage model after expanding the SCR macro model of the light control device to effectively simulate the fast transient response of the SCR under light.The maintenance current under light is increased by 35 m A compared to the non-light condition.The model established in the thesis can reduce the time and effort required to develop a new structure of lightcontrolled SCR devices,and has guiding significance for determining the ESD protection window and new control methods.