Number Of Characteristics Of Temperature Field Distribution In Plasma Chamber Research On Value Simulation And Calibration

The collection of temperature at each point in the material system is called the temperature field.The temperature field is one of the key parameters reflecting the characteristics of the plasma flow field.The accurate measurement of the temperature field is of great significance to the performance improvement and experimental design of the plasma cavity measuring device.However,the plasma high-temperature flow field has the characteristics of chemical-physical-thermodynamics multi-physical field coupling,showing complex multi-scale changes in time and space.Aiming at the key issue of plasma temperature field acquisition,combined with the real gas effect of plasma jet,this paper carried out the research of temperature field acquisition method combining chemical reaction kinetics modeling,flow field numerical simulation and experimental measurement,and realized the space Effective acquisition of two-dimensional plasma temperature field.The main research contents of the thesis are as follows:First of all,considering the real gas effect,use the CHEMKIN software to model the chemical reaction kinetics of the plasma,and summarize the changes in temperature and component concentration of the three common chemical reaction models under different working conditions;combined with actual experiments The obtained data(electron number density,temperature value of the measuring point,pressure change)systematically analyzed the influence of different chemical reaction models on the numerical simulation of plasma flow field.Select a set of optimized model output data,and use the calculated results of chemical reaction kinetics as the initial conditions for the next flow field numerical simulation.Secondly,based on the results of chemical reaction kinetics analysis,using the fluid dynamics numerical calculation model in the FLUENT software to analyze the plasma temperature field distribution characteristics,and obtain the temperature field simulation results of different working conditions(mass flow,vacuum degree and inlet temperature).Finally,a univariate linear regression model is established to obtain the linear fitting parameters between the measured value of the local location point and the simulated value.Through regression verification methods such as F test,scatter plot,residual analysis,etc.,a more reliable temperature field distribution prediction is obtained.function.On this basis,move the local location points,conduct experiments under the same conditions and organize the measurement data to verify the accuracy of the prediction function.