Research On Algorithm Optimization Of Direct Writing Path In Laser Direct Writing Processing Of 3D Micro-Optical Devices

Femtosecond laser direct writing technology based on two-photon absorption has processing precision beyond the limit of optical diffraction and processing capabilities of complex three-dimensional structures.It has broad application prospects in the fields of micro-optical devices,photonic material manufacturing,microfluidic devices,photonic integrated chips,and life sciences.When using laser direct writing technology to manufacture a three-dimensional structure,the processing path has an important influence on the performance of the structure.In this paper,a detailed study is conducted on the planning method and modification of the structure processing path in the fabrication of three-dimensional structures based on femtosecond laser direct writing technology based on two-photon absorption.The main research includes the following aspects:(1)The algorithm for automatically generating processing paths of femtosecond laser direct writing 3D structures is completed.the gray-scale image and the three-dimensional model representing the structural feature information are used to realize the automatic generation algorithm of the processing path respectively.Using this algorithm,the processing paths of various micro-optical devices such as microlens array,multi-value phase grating,spiral phase plate,etc.are generated and verified by experiments.The results of the topography of the structure show that the three-dimensional structure prepared by using the automatically generated processing path has obvious structural features,which verifies the feasibility of automatically generating the processing path of the micro-optical device.(2)The automatic correction of the processing path of the three-dimensional structure is completed on the existing processing platform,which compensates for the processing error based on the binary search method,the actual processing conditions are measured and the processing path is corrected.A comparative experiment was carried out to verify the processing path of the microlens array,which showed that the performance of the three-dimensional structure prepared by the modified processing path was superior.