Nitride Detection Based On Collision Electron Energy Spectrum And Emission Spectrum Analysis

The large number of applications of plasma in the industrial field makes the plasma diagnostic technology mature day by day.Electrostatic probe diagnosis is a common method to obtain the electron energy distribution function,and it is also the most accurate and direct method at present.Of course,the probe diagnosis of plasma requires a stable plasma environment to obtain more accurate plasma parameters.In contrast,emission spectroscopy does not require high plasma stability and the diagnostic method is nonimmersive and does not disturb the plasma,which is a popular research direction in the field of plasma diagnostics.However,the electron energy distribution function of the emission spectrum diagnosis is only applicable to the electron distribution in the low energy range.Therefore,in order to obtain an accurate electron energy distribution function from the experiment,the probe diagnosis is still the preferred diagnostic method.With the development of probe diagnosis,the measurement of plasma electron energy distribution function becomes more and more accurate,which makes the electron energy distribution function applicable to plasma state analysis.Due to the existence of penning ionization in the plasma,the existence of electron peaks with specific energy can be observed in the electron distribution function.Therefore,the Penning ionization reaction equation can be determined by the electron peak with characteristic energy,and then the reaction composition in the plasma can be obtained.This method is also called detection of impurity gas based on collision electron spectroscopy analysis.The electron distribution function of the fast electron peak containing the characteristic energy is called the collision electron energy spectrum,that is,the electron distribution function with the fast electron distribution generated by the collision,which is generally used in the analysis and detection of impurity gases.The purpose of this paper is to study the impurity gas analysis and plasma electron density and electron temperature diagnosis of the discharge ionization of the mixed gas of helium and nitrogen oxides under the conditions of medium and low pressure by Langmuir probe.At the same time,emission spectroscopy is also used to study the chemical reactions and reaction products of mixed gases during discharge,and to solve the plasma temperature based on the characteristic lines of the emission spectra.The research contents of this paper are as follows:(1)Build a DC glow discharge device under low pressure,realize stable DC glow discharge by adjusting the electrode spacing and discharge voltage and current.(2)Based on collision electron energy spectrum and emission spectrum of mixed gas.Perform qualitative analysis and study the chemical reactions and reaction products generated by the discharge.(3)Modify the first derivative of the I–V characteristic curve by introducing the near-wall loss function to make the characteristic electron peaks clearer.(4)Diagnose the plasma electron density and electron temperature through the electron energy distribution function and use the spectral intensity contrast method to calculate the plasma electron temperature.(5)Compare the obtained data and analyze the plasma parameters of different concentrations,different pressures,different powers and different types of nitrogen oxides.