Research On Laser Cleaning Of Quartz Glass Surface

Quartz glass is widely used in the fields of light source,electronics,optical communication,photovoltaic,laser,biomedicine,aerospace technology and national defense.It is easy to be polluted in the process of production,processing and daily use.In order to ensure the quality of production and processing and the accuracy of daily use,it is necessary to clean the pollutants on the surface of quartz glass,while the traditional cleaning method is not good and easy to cause damage to quartz glass.Laser cleaning is a new type of industrial cleaning technology which can achieve high efficiency,no pollution,high precision and no mechanical contact by adjusting laser parameters.It has great application prospect for the cleaning of dirt on the surface of quartz glass.The cleaning of alumina particles on the surface of quartz glass was selected as the research object.The influence of laser parameters on the cleaning effect during laser cleaning of alumina particles was studied by combining theoretical analysis,simulation and experimental analysis.The main contents and conclusions are as follows:(1)The temperature field model of quartz glass laser cleaning is established by simulating.The temperature field changes of different paths and the influence of laser parameters on the temperature field are analyzed.And the variation law of path temperature under different distance from the center of the spot and the peak temperature of the substrate surface with laser energy density,spot scanning rate,spot radius and spot overlap rate are obtained.(2)The cleaning threshold of 4?m diameter Al₂O₃ particles on quartz glass surface is predicted to be 0.32 J/cm².According to the relationship between peak temperature and laser energy density,the damage threshold of quartz glass matrix during laser cleaning is predicted to be 6.87 J/cm².(3)The experimental study of laser cleaning quartz glass shows that laser cleaning technology can effectively remove alumina particles on the surface of quartz glass.And the actual cleaning threshold and damage threshold are obtained,which is very close to the predicted value.Meanwhile,the influence of laser energy density and spot scanning rate on the cleaning rate is obtained.