Experimental Study On Electromagnetic Field Near Field Imaging Of Microwave Integrated Components

In recent years,with the development of science and technology and the continuous improvement of people’s living standards,integrated microwave circuits are widely used in Internet,5g,medical,automotive electronics,electronic measurement and other fields.The manufacturing technology of integrated circuit is developing rapidly,but the corresponding testing and failure analysis technology is far behind the rapid development of lithography and other integrated circuit manufacturing technology.In this paper,based on the quantum bit of diamond NV color center,the imaging technology of microwave magnetic field on the surface of microwave devices is systematically studied.The main research contents are as follows:This paper introduces a kind of microwave near-field imaging system based on Diamond NV color center fiber probe.The system includes confocal optical path,hardware control part and core diamond NV color center fiber probe.The optical fiber probe is made by taper technology.The size of the diamond particles carried by the probe can reach micron level.The device can be imaged in the surface microwave nearfield at a distance of 10 microns from the measured device.The probe is quantum calibrated and does not need later calibration.Based on this system,we also developed pulse ODMR technology and Rabi oscillation measurement technology,which are the basis of scanning imaging technology.Based on this system,the near-field line scanning of a coplanar waveguide is carried out,and the results are basically consistent with the simulation results of HFSS.In order to master the relative position of NV color center in the space coordinate system,this paper introduces the NV axial positioning system based on controllable electromagnetic field and three-dimensional rotating manipulator.Based on this system,we can realize the axial positioning of the unknown axial NV color center,and according to the specific algorithm,we can use the mechanical arm to realize the axial rotation of the NV color center in any direction(usually,we rotate the NV axis to the X,y and Z axes of the spatial coordinate system).This technology is an important basis for the subsequent vector microwave magnetic field imaging.Based on the known axial NV color center of diamond,we developed a vector microwave magnetic field imaging system,which is mainly composed of a known axial fiber probe,an optical path,a hardware control part and a static magnetic field control part.We use this system to scan the coplanar waveguide in four different axial directions,and use HFSS to simulate the results.The comparison results are basically consistent.In order to better illustrate the importance of vector microwave magnetic field imaging,we have carried out three times vector microwave magnetic field imaging in X,y and Y axes of an L-shaped waveguide,and the results are obviously different.We have simulated the microwave magnetic field in these three directions,and the results are basically consistent with the detection results.At the end of this paper,all the research work is summarized,and the future research points of microwave magnetic field detection technology based on Diamond NV color center are prospected.