| A defect detection algorithm applicable for periodic VLSI circuitry is presented in this thesis. Even though the algorithm is based on the reference comparison approach, the periodicity of the circuit eliminates the need for the so called "golden wafer." The suggested algorithm has demonstrated the ability to detect defects of small area (0.023% of the image area). In addition, the algorithm was 93% successful in defect detection and has a false alarm rate of 0.067 per inspected frame, based on testing 20 frames. |
