| Biosensors are a special class of chemical sensors that take advantage of the high selectivity and sensitivity of biologically active material. We have investigated the characteristics of various deposited electrode coatings (Au, Pt, Fe, Ni, Ti) on 10 MHz quartz crystals using the sputtering method. A change in mass occurs due to the binding of antigens and antibodies on the surface of the thin film coating. The frequency changes as a result of a change in mass which makes it possible to use these crystals as biological sensory devices. The characteristics of the different coatings are being characterized by an x-ray diffractometer. The growth morphology of the coatings deposited under different process conditions are being determined by Atomic Force Microscopy. It has been demonstrated in this research that using conductive electrode coatings on quartz crystal substrates makes it possible to implement the device as a biologically sensitive sensory. |
