Micromachined movable platforms as integrated optic devices

The goal of the research described in this thesis was to advance the performance of active integrated switch structures for optical systems using micromachining techniques and finite element modeling for systems application. This was achieved by: (1) improving the performance of optical switching devices and (2) using specific techniques of system integration between micromachines and integrated optic circuits. Accordingly, a simple micromachined platform was fabricated to operate as an optical switch, attenuating the signal transmission through a waveguide when activated. Improvements in the optical components used in an integrated optic circuit system were made. The primary vehicle for these improvements was the fabrication of compatible and refined waveguide structures.;In the pursuit of the above goals, experiments involving electroplating techniques have produced significant advances in surface micromachining fabrication technology, leading to improvements which allow devices with high aspect ratio to be made more easily. Polyimide was used as a structural material for the movable platform due to its processing ease, chemical resistance, flexibility and planarizability. In addition, the use of polyimide materials for the general advancement of micromachining technology was studied. Various polyimide and polyimide composite materials were investigated.;Finite element modeling (FEM) of the electrostatic system and mechanical properties has been carried out to identify suitable Micro-Opto-Mechanical Systems (MOMS) designs and determine the effective residual stress in these fabricated structures. Results from the analysis of MOMS and an optical switch based on a micromachined platform were discussed. These optical devices are important because they provide the advantage of refined control of the position of light emitters and detectors as well as waveguided signals in optical systems.;Micromachined movable platforms for optical switching are well suited for integrated optic systems. For this reason, these new micromachining techniques should be further explored for use in optical communication devices.