| This thesis focuses on a theoretical and experimental investigation of the micromanipulation of microscopic mechanical parts for assembly of complex microsystems. There are two main parts to this thesis. In the first part, design and implementation of a micro force sensing system based on optical beam deflection techniques are presented. Using this micro force sensing system, a theoretical and experimental investigation of micromanipulation mechanics are undertaken. Then a microgripper with an integrated nanonewton scale force sensor is designed and implemented. In the second part, the integration of force and vision feedback for microassembly is studied. An algorithm for optical microscope calibration is developed and experimentally verified. In addition, a control strategy for integrating force and vision feedback to achieve nanonewton scale impact is experimentally presented. |
