Real-time measurements of film growth using fixed-angle X-ray reflectometry and diffraction techniques

This thesis details the use of X-ray characterization techniques to measure thickness, crystallinity, phase, and texture of thin films in-situ . This work is organized into 4 distinct chapters; a detailed discussion of X-ray generation and detection for comparing “speed” and “intensity” of various characterization techniques for real time applications, a brief look at deposition system designed and constructed around an X-ray instrument, an example of X-ray phase and texture measurement using a 2-dimensional area detector and a brief discussion on advantages/disadvantages for in-situ analysis, and a detailed approach to energy dispersive X-ray reflectometry measurement of film thickness and a step-by-step listing of measurable quantities and limitations to energy-dispersive modeling.; The principal advancements to the X-ray field presented include the incorporation of energy-dependent anomalous atomic scattering factors into the reflectometry modeling to better characterize energy dispersive reflectometry data. The thesis details the energy dispersive reflectometry limitations caused by instrument response functions and geometric source and detector divergences using a graphical, reciprocal space approach applicable for refining the development of new in-situ characterization tools for industry. The thesis concludes with an appendix of modeling routines used for data fitting.