Characterization of smart MEMs pump by applying quasi-static model based on simulations of membrane and solid-fluid interface of microvalves

A novel MEMS-based micropump is designed, which is self-actuated in response to external pressure change; hence named IMSP (I&barbelow;ntelligent M&barbelow;icro-S&barbelow;ensor/P&barbelow;ump). An ordinary differential equation (ODE) is derived to model and characterize IMSP under quasi-static conditions. This quasi-static model is valid within range of low operating frequency. IMSP critical components---membrane and microvalves---in the ODE are characterized individually. First, the small deflection theory is employed to analyze stroke volume by simulating membrane deflection in ANSYS. Next, to characterize microvalves, sequential weak fluid-structure coupling is used to simulate flow rate by ANSYS/FLOTRAN. Finally, IMSP is characterized based on the flow rate calculated from the microchamber pressure, which is solved from the ODE in MATLAB.; Bossed-membrane IMSP provides larger linear operating pressure range; that is, larger stroke volume at its maximum operating pressure comparing to flat membrane. It is concluded that bossed-membrane IMSP has higher flow rate because of larger microchamber pressure.