| A micro Particle Imaging Velocimetry (PIV) system for bulk measurements in microfluidic systems was constructed. Numerical and experimental analysis with ANSYS FLOTRAN and with micro PIV was performed on microfluidic valves, mixers, and pumps developed as part of this work. Numerical model validity and microfluidic system component performance was determined. The numerical models underpredicted microfluidic component performance. Surface micromachining, Micralyne Protolyne technology, and Silicon on Insulator (SOI) techniques were used to produce the components. |
