| This thesis addresses circuits and systems optimized for the unique requirements of near-field microwave microscopy (NFMM). A suite of qualification measurements is conducted for the systematic characterization of the NFMM measurement system. Finally, modeling methods and quantitative analysis are performed for the interpretation of resulting measurements.;An NFMM measurement typically suffers from small signal in the presence of seemingly overwhelming white and 1/f noise. As such, it requires instrumentation that provides signal enhancement, noise reduction, and long-term stability. This thesis describes the design and characterization of probe circuits and probe tips which enable sensitive and high-resolution NFMM with enhanced signals. The space efficient probe circuit is designed for ease of integration and eventual MMIC implementation.;The scanning Lock-in Vector Near-field Probe (LVNP) instrument is designed for the readout of the near-field probe circuit. Selection of measurement topology for the purpose of noise reduction/mitigation is described. The LVNP is characterized with respect to noise, stability, and maximum signal sensitivity.;In summary, this thesis details the design of a complete system for near-field microwave microscopy including probe tip, probe circuit, and instrument design. Performance limitations are quantified throughout the thesis in the hope of promoting a systematic approach to NFMM instrumentation, and quantitative data analysis techniques are proposed. |
