| This study deals with the hybrid integration of single electron transistors (SET) on a CMOS technology nod. SET devices possess a high potential, especially regarding energy efficiency, but aren't fit to completely replace CMOS components in electrical circuits. However, this problem can be solved through hybrid combination of SETs and MOS, leading to very low operating power circuits, and high integration density. This thesis investigates the use of the nanodamascene process, developed by C. Dubuc, for back-end-of-line (BEOL) SET fabrication, meaning creation of SETs in the oxide encapsulating CMOS devices. The assets the nanodamascene process presents are quite interesting: fabrication of SETs with a large operation margin, high repeatability, and potential for BEOL fabrication. This last point, in particular, makes this process promising. Indeed, it opens the path to the fabrication of numerous layers of SETs, stacked one upon the other, and forming 3D circuits, created on top of 2D CMOS layer. Thus a high gain to existing CMOS wafers could be generated. Devices created through the use of the nanodamascene process, adapted for BEOL SET fabrication, are presented. Limits and improvement perspectives of the technique's transfer are discussed. Electrical characterizations of the devices are also presented. They have demonstrated the created devices functionality, thus validating the successful adaption of the nanodamascene process. They have also allowed for the identification of numerous traps located at the heart of fabricated devices. Fabricated SET devices potential for hybrid SET-CMOS circuits was studied through simulations. Possible architectures showing good potential for early hybrid circuits' realization were identified.;Keywords: MOSFET, single electron transistor (SET), nanotechnology, microfabrication, nanodamascene, electrical characterization. |
