| The main objective of this research is the fabrication of an optical Fabry-Perot pressure sensor using a novel technique comprising photolithography, e-beam evaporation and electroplating. This sensor is based on an optical Fabry-Perot interferometer cavity, which has high sensitivity compared to intensity modulated pressure sensors. The optical reflectance varies with depth caused by pressure variations. The sensor uses a step index fiber and is relatively insensitive to absolute light levels, power variations and fiber bending.; Miniaturized characteristic of these sensors qualifies them in situations, where small size and dense arrays arrangement are advantageous. Optical interrogation of these sensing elements presents an opportunity to extend the use of these sensors to special environments like electromagnetic interference, high temperatures etc. Further, there are a number of biomedical applications, where electrically activated devices employing conducting materials are not suitable.; The sensor consists of two major parts: single-mode optic fiber with a 125 mum diameter and transmitting mirrors of a Fabry-Perot reflective cavity at the tip of the fiber. (Abstract shortened by UMI.)... |
