| In MEMS devices, the most common actuating and sensing method is electrostatic transduction. Unavoidable time delays in both controllers and actuators are becoming a serious problem. These time delays degrade the stability performance of the systems because they make the external energy sources fed to the systems at inappropriate time paces. On the other hand, properly-designed time delays can be introduced to control the systems' performance as we want. In this thesis, we present linearization analysis and perturbation analysis for electrostatic MEMS resonators with a velocity time-delayed feedback controller. The method of multiple scales, a perturbation method, is first used to generate analytic solutions for parallel-plate capacitor resonator. It reveals the effects of time-delayed controller gains on the systems' dynamics. We compare the analytic solutions to numerical results. Finite difference method is utilized to analyze the response of the system for large motion. |
