| The micromachined mechanical resonators using MEMS technology have potential industrial applications in the fields of sensors and actuators as well as in the field of wireless telecommunications where the single chip transceiver system might be possible by using the micromachined mechanical resonators to replace all bulky, expensive and off-chip filters and oscillators. The rapid growth of these micromachined mechanical vibrating devices has increased needs for developing highly effective testing systems which are capable of testing the performance of the vibrating elements.; The testing of the micromechanical vibrating devices is usually performed using capacitive, piezoelectric and piezoresistive detection with network analyzer, spectrum analyzer and lock-in techniques. They, however, often encounter the interference from other parasitic signals including electrostatic feedthrough currents.; In this thesis optical techniques for detecting tiny movement of object were employed and compared with traditional electrical techniques. The optical methods utilized were laser beam deflection and optical interferometry. (Abstract shortened by UMI.)... |
