| This thesis presents modeling and prototype fabrication and characterization of new types of piezoelectric ultrasonic micromotors.; Our approach in designing these piezoelectric motors was: (i) to simplify the structure including the poling configuration of piezoelectric elements used in the stator and (ii) to reduce the number of components in order to decrease the cost and enhance the driving reliability.; There are two different types of piezoelectric motors designed throughout this research. The first of these designs consists of a metal tube, on which two piezoelectric ceramic plates poled in thickness direction, were bonded. Two orthogonal bending modes of the hollow cylinder were superimposed resulting in a rotational vibration. Since the structure and poling configuration of the active piezoelectric elements used in the stator are simple, this motor structure is very suitable for miniaturization. Moreover, a single driving source can excite two bending modes at the same time, thus generate a wobble motion.; Three types of prototypes are included in this design. The piezoelectric stator structure is the same for all. However, the dimensions of the motors are reduced by almost 50 percent. Starting with a 10 mm long stator, we reached to 4 mm in the last prototype. The initial diameter was 2.4 mm, which was reduced to 1.6 mm. In the final design, the rotor part of the motor was changed resulting in the reduction in the number of components.; In terms of driving circuit, a single driving source was enough to run the motors and a conventional switching power supply type resonant L-C circuit was used. A simple motor structure with a simple driving circuit were combined successfully and fabricated inexpensively.; The second design is a shear type piezoelectric linear motor. The behavior of a single rectangular piezoelectric shear plate was analyzed and after optimizing the dimensions and the mode characteristics, a prototype was fabricated. The prototype consists of one layer of ceramic and a brass teeth-like layer bonded on it. The displacement was amplified with the metal layer, the teeth of which were placed on the points of in-phase motion. The targeted application area is paper-feeding mechanism.; In terms of application areas for the first design, a gas valve system and a micro vehicle were constructed. In addition, a new optical coherence tomography endoscope by utilizing the piezoelectric micromotor was designed. Finally, the prototype motor was integrated inside the camera of a cell phone to drive the zoom mechanism. |
