Modeling transport of thermalized neutrals in a sputter deposition system

Thermalization of energetic neutrals produced at the target in a typical magnetron sputter deposition system occurs as energetic particles collide with background gas atoms. After thermalization, transport of neutrals is believed to be governed by diffusion phenomena. This effect is responsible for reducing the energy of incoming particles to the substrate which in turn affects the quality and characteristics of the film being deposited. A coupled model that approximates transport of the thermalized particles in a typical magnetron sputter chamber is presented. The thermalized model follows a fluid approach to predict steady state spatial distributions of thermalized particles as a function of position. Particle diffusion is coupled with an anergy solver to consider the effect of gas heating on particle and energy flux at the substrate.