Laminated chemical and physical micro-jet actuators based on conductive media

This dissertation presents the development of electrically-powered, lamination-based microactuators for the realization of large arrays of high impulse and short duration micro-jets with potential applications in the field of micro-electro-mechanical systems (MEMS). Microactuators offer unique control opportunities by converting the input electrical or chemical energy stored in a propellant into useful mechanical energy. This small and precise control obtained can potentially be applied towards aerodynamic control and transdermal drug delivery applications. This thesis work discusses the feasibility of using microactuators for two such applications: Control of the motion of a spinning projectile by utilizing the chemically-driven microjets ejected from the actuators, and enhancement of the permeability properties of skin by selectively ablating the stratum corneum layer of skin using the physical microjets ejected from the actuators. This enhanced permeability of skin can later be used for the delivery of high molecular weight drugs for transdermal drug delivery.;The development of electrically powered microactuators starts by fabricating an array of radially firing microactuators using lamination-based microfabrication techniques that potentially enable batch fabrication at low cost. The microactuators of this thesis consist of three main parts: a micro chamber in which the propellant is stored; two electrode structures through which electrical energy is supplied to the propellant; and a micro nozzle through which the propellant or released gases from the propellant are expanded as a jet. Once the actuators are fabricated, they are integrated with MEMS-process-compatible propellants and optimized so as to produce instantaneous ignition of the propellant. This instantaneous ignition is achieved either by making the propellant itself conductive, thus, passing an electric current directly through the propellant; or by discharging an arc across the propellant by placing it between two closely spaced electrodes. The first concept is demonstrated for the application of projectile maneuvering where energetic solid propellant is used in generating a high velocity gaseous jet and the second concept is demonstrated for transdermal drug delivery application where a rapid physical jet of a non-energetic propellant is generated.;In the case of chemical-based microactuators, the feasibility of using conductive solid propellant based actuators for maneuvering a 25 mm bluff body projectile spinning at 600 Hz is presented. Several conductive solid propellants are developed and characterized for their electrical conductivity and required ignition energy. Finally, the propellant integrated microactuators are characterized for performance in terms of impulse delivered, thrust generated and duration of the jet. These experimental results are then compared to predicted results from simulations.;In the case of physical based microactuators, the feasibility of using released physical jets from the microactuator array for transdermal drug delivery application is presented. Several bio-compatible and FDA-approved liquids are used as propellants and are characterized in terms of thrusts delivered and duration of the released jets. These thermo-mechanical jets are then used to expose skin locally so as to create micro conduits in the stratum corneum layer of skin. Both thermal effects and thermo-mechanical effects of the jet on exposed skin are studied. For both cases, histology of exposed skin is presented and its permeability to drug analog molecules is studied.