Conception et fabrication d'un filtre accordable avec la technologie des MEMS pour les applications micro-ondes

For several decades wireless communications have been in great expansion. This phenomenon requires the continuous improvement of the systems, for the algorithms and materials. The goals are to have more selective filters with reduced cost and dimensions and with insertion losses as low as possible. The increase of transmission number and quality needs to divide the frequency. Frequency hopping is useful for tactical communication. That's why tunable filters became the key to make such reconfigurable systems.;This study is intended for communications in the band 1,35 GHz - 2,7 GHz. It differs from the majority of the publications on this subject for which the applications to the top of 15 GHz prevail.;The filter designed in this project is a half wave resonator tuned with capacitance. Ohmic MEMS switches are designed specifically for this application, and used to select fixed capacities to reachable discrete values. Theory is used to size this RF MEMS component, and characterization is complete using both theory and coupled electromechanical simulations.;This tunable filter including RF MEMS switches was built using the facilities of McGill University of Montreal. The tuning range is from 1,536 GHz to 2,174 GHz, the insertion losses are 5,5dB 2,174GHz and 11,7dB 1,536GHz, and the bandwidth varies between 20 MHz and 40 MHz.;In this context, MEMS technology permits new perspectives. Already presents in various domains, their first steps in RF were in 1990s. Main researches highlighted the advantages of RF MEMS: miniaturization, low consumption of power, low losses, linearity of their behaviour, while being compatible with a monolithic integration like MMIC.