RF MEMS Switches And Phase Shifters Research And Optimization

A lot of attention is drawn to the research of MEMS. Nowadays, RF MEMS accessory has found its great application due to its small size, light weight and low power consumption.This paper based on the technology of RF MEMS and focused on RF MEMS switches and phase shifters.About RF MEMS switches, this paper analysed and simulated MEMS capacitive shunt switches and MEMS-series switches. Based on the analysis results, I got the switch inductance from the CLR modal, designed low resonant frequency MEMS capacitive switches and wideband MEMS capacitive switches.About RF MEMS phase shifters, this paper introduced and analysed distributed MEMS phase shifters and switched-line MEMS phase shifters. According to the special character of the RF MEMS switches in the distributed phase shifter, the optimization is done considering its mathematics model. The optimized phase shifter results in increased capacitance ratio, more phase shift and lower actuation voltage.The experiment results suggest a reasonable design and a feasible process arrangement. The conclusion is constructive to deeper research in the MEMS device fields.