Luminescence contact imaging microsystems

This thesis presents two hybrid luminescence-based biochemical photosensory microsystems: a CMOS/microfluidic chemiluminescence contact imager, and a CMOS/thin-film fluorescence contact imager. A compact, low-power analog-to-digital converter (ADC) architecture for use in such sensory microsystems is also proposed. Both microsystems are prototyped in a standard 0.35mum CMOS technology.;The CMOS/thin-film microsystem integrates an existing 128x128-pixel CMOS imager and a prefabricated, high-performance optical filter. Experimental validation is performed by detecting human DNA labeled with Cyanine-3 fluorescent dye.;The proposed ADC architecture employs a novel digital-to-analog converter with a flexible trade-off between the integration area and the conversion speed. The area savings and good linearity of the DAC are verified by simulations.;The CMOS/microfluidic microsystem integrates a 64x128-pixel CMOS imager and a soft polymer microfluidic network. Circuit techniques are employed to reduce the dark current and circuit noise for low-level light sensitivity. Experimental validation is performed by detecting luminol chemiluminescence and electrochemiluminescence.