| The terahertz (THz) region of the electromagnetic spectrum extends from 100 GHz to 10 THz (1 THz corresponds to a wavelength of 300 microns) This region, alternatively called the far-infrared, lies below visible and infrared wavelengths and above microwave wavelengths. From RF waves through X-rays, this narrow portion of the electromagnetic spectrum is the least developed and therefore the least understood. The term "terahertz gap", is often used to describe this scientifically rich but technologically underdeveloped frequency range. Recently, artificially structured electromagnetic (EM) materials have become an extremely active research area because of the possibility of creating materials which exhibit novel EM responses not available in natural materials, such as negative refractive index. Such EM composites, often called metamaterials, are sub-wavelength composites where the electromagnetic response originates from oscillating electrons in highly conducting metals such as gold or copper allowing for a design specific resonant response of the electrical permittivity epsilon or magnetic permeability micro. This is especially important for the technologically relevant terahertz frequency regime where there is a strong need to create components to realize applications ranging from spectroscopic identification of hazardous materials to noninvasive imaging. This thesis has focused on the development of functional THz components using MEMS technologies, which show extreme power at the micro scale level. We have designed, simulated and fabricated state-of-the-art THz components which include the flexile THz metamaterials, bio-compatible silk THz metamaterials, THz perfect absorbers, selective metamaterial detector modules for active THz radiation detection, and reconfigurable THz metamaterial devices. Preliminary results demonstrate the potential of MEMS-enhanced metamaterials for creating functional THz devices to fill the THz gap. Hopefully, this research could shed light on identifying effective means for engaging the MEMS/NEMS community in work important to continuing advances in photonics and sensor innovations. |
