Research On Driving Of Two-dimensional MEMS Micromirror Based On Lidar

Compared with traditional laser radar,MEMS(Micro-Electro-Mechanical System)micro-mirror scanning laser radar has obvious advantages such as field of view and resolution,such as electronic control,small size and light weight,which is an important development direction of laser radar.Based on the development of MEMS micro-mirror laser radar,the mathematical model of the electromagnetic MEMS micro-mirror system motion is established,and the electromagnetic MEMS motion characteristics are analyzed and calculated in detail.Aiming at the shortcomings of the electromagnetic MEMS micromirror due to the short scan angle caused by the fast axis resonance point shift,a control method for real-time solution of resonance point is proposed.A micro-mirror servo control based on real-time solution of resonance point is designed.System,the system consists of ARM +DDS.A corresponding control program has been written.By constructing an electromagnetic MEMS micromirror control platform,the relationship between the deflection angle of the micromirror system and the amplitude,frequency and temperature of the driving signal is experimentally determined,and the system can maintain the slow axis 30°and the fast axis 40°.The stable and reliable optical scanning is achieved,which meets the basic requirements of the project application.