| With the rapid development of micro nano mechanical and electrical system,the new requirements of micro integration and functional integration are put forward for modern sensors,while the traditional mechanical motion sensors are difficult to achieve a big breakthrough in this area.On the other hand,with the progress of friction nano science,triboelectric nanogenerator has been widely concerned and discussed since it was invented.It is a new energy technology based on the coupling effect of mechanical interface friction electrification and electrostatic induction,which can convert various forms of external mechanical energy into electrical energy.It has been proved to be able to be used as wind energy,water energy,tidal energy and human body Energy collection device for walking,mechanical movement and other energy sources.Based on the research of theoretical and experimental models,the triboelectric nanogenerator has unique advantages in micro nano energy capture efficiency,manufacturing cost,material selection diversity,function integration,etc.,and the output signal of the triboelectric nanogenerator can also sense the change of mechanical excitation.Using this principle,the triboelectric nanogenerator can also become a mechanical motion sensor detection device.In this paper,based on the principle of triboelectric nanogenerator,the corresponding triboelectric motion sensors are designed for three common mechanical motion forms,and their power generation and sensing performance are studied in detail.A kind of triboelectric speed sensor which can be integrated with the bearing is designed and constructed.The function of speed measurement can be realized by making small changes in the structure of the original bearing seat.The potential distribution and working principle are simulated and verified by means of finite element analysis,and the variation law of its output characteristics is studied systematically,which proves that it can provide power for some electronic devices with low power consumption.The sensor is calibrated by extracting the signal characteristics at different rotational speeds.Change the structure size of the sensor,verify its consistency and stability.Finally,through the establishment of the corresponding test-bed,the sensor accuracy is evaluated.A sweep type linear motion sensor based on interleaved electrodes is designed and constructed,which improves the resolution of the sensor and ensures the durability of the device.The electric potential distribution and working principle of the sensor are simulated by means of finite element analysis,and the output characteristics of the sensor are studied systematically.According to the characteristics of the signal,the corresponding real-time filtering algorithm is studied,which significantly reduces the noise interference in the test process.Through the integration with ball screw,and set the corresponding theoretical trajectory to evaluate the measurement accuracy of the sensor.Finally,the durability of the sensor is tested by long-time reciprocating motion.A kind of friction electric arc trajectory motion sensor is designed and constructed,which not only improves the resolution of the sensor,but also ensures the durability of the equipment and reduces the use cost.The working principle of the sensor is simulated and verified by the finite element method.Through the theoretical analysis,the calculation formulas of the open circuit voltage and the short circuit charge of the sensor are derived.The output signal of the sensor is simulated by hardware circuit,and the original periodic signal is transformed into square wave signal while the phase error is effectively reduced by combining the operational amplifier and hysteresis comparison circuit.Finally,a method of signal merging is proposed by combining XOR logic circuit,which improves the sensing resolution,reduces the dependence on the number of acquisition interfaces,and ensures the real-time performance of the sensor and the stability of the equipment. |
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