Research On The Method Of The Precision Of The Motion Control Platform Of Lithography Machine

With the continuous development of semiconductor technology and electronic industry,related enterprises have higher and higher requirements on lithography machines.How to improve the precision of motion control of lithography machines has become an important issue.Therefore,this paper studies how to improve the performance and accuracy of the motion control system of direct writing lithography,which has important theoretical significance and practical application value for accelerating the development of China's semiconductor industry.Motion control system based on direct write lithography,to improve the accuracy of motion control system,the control strategy of motion control system are studied,put forward in combination with low pass filtering with feed-forward fuzzy PID control method,and the simulation and experiment comparison,verify with feed-forward superiority and practicability of the fuzzy PID control method,and combined with low pass filtering function,increase the stability of the motion control system.In addition,the system positioning error compensation caused by the design,manufacture and assembly of the mechanical mechanism of the motion control platform is studied to further improve the precision of the motion control platform.His main work includes:(1)The structure of the motion control system and the characteristics of the motion control system were analyzed,and the motion control system of the direct-writing lithography machine was modeled.(2)The index demand of motion control system is put forward,and the control strategy is studied.The control strategy with feed forward fuzzy PID and low-pass filtering is adopted.Finally,the error compensation of motion control system is studied and spline interpolation compensation is used as the error compensation method.(3)Combining with the actual motion control system of direct writing lithography machine,several control strategies are verified and compared in practice.The feasibility of fuzzy PID control with feed-forward and the necessity of low-pass filtering function are successfully verified,and systematic error compensation is carried out for the motion control system.