A High Resolution Linear Time Grating Displacement Sensor With Multi-parameter Synergy Modulation

The time grating sensor has the advantages of strong anti-interference ability,good stability and easy implementation.It is based on the important idea of space-time conversion.It converts the amount of spatial displacement into electrical signals by inducing the change of the electromagnetic field,and then uses the high-frequency clock pulse to interpolate the phase difference to achieve high-precision and high resolution displacement measurement.With the development of time-grid displacement sensors in the direction of high-resolution measurement,traditional time-grid displacement sensors also need to use ultra-precision characterization technology to reduce the space grating distance to improve resolution.In view of the above problems,this paper proposes a measurement method based on multi-parameter cooperative modulation,which continues the innovative idea of time grating technology,combines PCB process technology with time grating measurement technology,and studies multi-parameter coordinated modulation high-resolution linear time grating sensor.The main research contents are as follows:(1)This research analyzes the generation principle of time-varying magnetic field,studies the time-varying magnetic field constraint method,and adopts multi-parameter cooperative modulation method to realize high-resolution measurement in combination with the time-grating measurement principle.(2)Based on the principle of electromagnetic induction,studying the measurement structure of the sensor,analyzing and derive the theoretical basis of the high-resolution linear displacement sensor measurement,and analyzing the process of the sensor's induced electromotive force decoupling into displacement information,a high-resolution displacement sensor model with different parameters coordinated modulation is theoretically proposed.(3)3D modeling based on the sensor structure,establishing a multi-parameter co-modulated linear time grid displacement sensor model and using ANSOFT MAXWELL electromagnetic field finite element simulation,MATLAB software to simulate the structure of the sensor plane coil,to quantify the relevant basic parameters The electromagnetic field finite element simulation verified the structural feasibility of the multi-parameter co-modulation sensor with different structures.(4)The sensor structure is proposed and the actual sensor is produced.Designed and manufactured the hardware system,built an experimental platform,and conducted signal experiment tests on the stability of the input signal and sensor to ensure the accuracy of the sensor signal at the source;A resolution experiment on the sensor was carried out,with data analysis and processing performed based on the measurement results.The effectiveness of the sensor is verified through experiments.The sensor can achieve the effect of improving the resolution of the signal source by 2 times without changing the spatial distance between the excitation coil and the induction coil,and the measurement accuracy of the sensor in the range of 0-50 mm is ± 70?m.It has the advantages of not relying on ultra-precision reticle technology,simple structure and suitable for harsh environments.