Motion Trajectory Fitting Of Etching Machine Based On Fuzzy Control Technical Research

Diffraction grating is the core device of scientific instruments such as grating spectrometer,and its production technology has been blocked by foreign countries.However,it plays an indispensable role in important fields such as astronomy and aerospace.Therefore,it is self-evident that breaking the foreign monopoly and making a large national heavy machine capable of producing diffraction gratings.Diffraction gratings are mainly produced by mechanical scribing and ion beam etching.Among them,the ion beam etching method is widely used because of its simplicity and the excellent output of the grating.Ion beam etching machines require etching of planar gratings and curved gratings.This requires the etching machine working platform to produce both etched tracks of straight and circular arcs.The etching machine working platform can not perform smooth curve motion,so a suitable trajectory fitting algorithm is needed to generate an etch track as close as possible to the arc.With the circular path fitting algorithm,a high-precision transmission is needed to drive the working platform to realize the etching of the diffraction grating.The characteristics of the high-precision stepper motor control system are suitable for this.Class scenario.In this paper,the etch track fitting algorithm is designed firstly,the basic principle of the trajectory fitting algorithm is analyzed,the mathematical model of the working platform is established,the defined initial position and incident angle of the ion source are given according to the formula,and finally the straight line is established.The trajectory fitting algorithm of the circular trajectory completes the design of the trajectory fitting algorithm.Then the mathematical model of two stepping motors in the motion control system is introduced,and the fuzzy controller is designed according to the traditional PID and fuzzy PID principle to control the whole motion control system.Finally,an electronic control system combining the trajectory fitting algorithm and the motion control system is designed.The system has four main modules,which are power supply module,vacuum acquisition module,motion control module and communication module.After the completion of the electronic control system,the actual experimental comparison of the stepper motor control algorithm is carried out,and the superiority of the control algorithm is verified.Afterwards,the actual scoring experiments of plane,concave and convex gratings were carried out.The actual scoring trajectory data was collected by grating scale and encoder,and the data was analyzed by Matlab.The actual trajectory was compared with the preset trajectory.There is error analysis.The experimental results show that the error of the linear path etch angle of 15 cycles under the control of the motion control system is less than 2°,and the cumulative position deviation is less than 0.218 mm.The 7-cycle convex grating etching track etching angle error of the motion control system is less than 2°,and the accumulated position deviation is less than 2.18 mm.Under the control of the motion control system,the etching angle error of the 7-period convex grating etching track is less than 2°,and the accumulated position deviation is less than 2.39 mm.The anti-interference ability and accuracy of the motion control system meet the requirements of equipment use.