Modeling And Parameters Extraction Of Graphene On-Chip Spiral Inductors

On-chip spiral inductors,with low cost and ease of process integration,have been widely used in radio frequency integrated circuits such as low noise amplifiers,mixers,voltage-controlled oscillators and matching networks.However,with the emergence of 5G communication technology,traditional metal spiral inductors have been unable to meet the performance requirements of the device under high frequency operation.Therefore,the combination of new nanomaterials and traditional passive devices could be a chance for integrated circuit manufacturing,which need to be high-frequency,miniaturized,and highly reliable.And graphene,with its excellent characteristics,is expected to replace traditional metals and become the basic electronic material for the next generation.The research work in this paper mainly focused on the design and modeling of graphene on-chip spiral inductors.The related properties of graphene and the application of graphene and other carbon nanomaterials in the field of on-chip inductors are deeply studied.The development of on-chip inductor modeling is reviewed.Based on the theory of spiral inductors,the improvement of the design and modeling of graphene spiral inductors is proposed.The main content of this paper includes: 1)The performance parameters and electromagnetic loss mechanism of the on-chip spiral inductors are introduced,which providing a theoretical basis for the design and optimization of the inductor;2)The effects of geometric parameters and process parameters on the performance of graphene spiral inductors were studied respectively,after which the optimization design method was explored;3)An improved graphene spiral inductor equivalent circuit model is proposed.Based on the traditional single-π model,the model increases the capacitive component C of the series branch according to the high-frequency characteristics of the graphene inductor.It is applied to a graphene inductor with an outer diameter of 24μm,a line width of 3μm and a thickness of 62 nm.The simulation results are close to the experimental data,so the model can accurately describe the characteristics of graphene inductors;4)A parameters extraction method suitable for the improved effective model of graphene spiral inductors is proposed.With the combination of the analysis method and the optimization method,the extraction method uses the analysis method to determine the initial value of the parameter,and then uses the optimization method to improve the accuracy.It is accurate and convenient to extract the intrinsic parameters of the inductor model with the new method.