Research On Precision Positioning Platform System Based On Microscopic Image

With the development of modern technology and the continuous improvement of micro-nano manufacturing technology,the requirements for the resolution and precision of the precision positioning platforms are improved.In order to ensure that the precision positioning platform can realize multi-directional,multi-degree of freedom,high-precision and other functions,it is necessary to have the measurement technology corresponding to its precision so as to realize the all-round monitoring and closed-loop control of it.Based on the analysis of the application of phase mask method to fabricate fiber gratings and fiber tapering technology,this paper studies the precision positioning platform system that is suitable for writing grating and tapering.According to the principle of optical and non-optical calibration methods,this paper starts from the analysis and selection of the following four different calibration methods: Vernier caliper calibration method,Michelson interferometer calibration method,the grating ruler calibration method and the microscopic image calibration method,determines the system indicators according to the requirements,and then adopted a calibration method based on microscopic image.The author chooses the 0.25?m precision mobile platform of Japanese KOHZU company to study the collection,noise canceling,transformation and identification of the calibration image,and conducts an integrated study on the system at the same time,as a result,the platform driver hardware production,the software of calibration parameters and the precision positioning platform was completed,and the expected application goals were achieved.The paper also carried out a more comprehensive systematic experimental test.Firstly,the experimental research on the calibration method and effect shows that the system is very precise and sensitive to environmental factors.The magnification of the microscopic image and the sampling resolution of the CCD directly affect the accuracy of the positioning.Secondly,the system performance was tested in 4.5 x and 10 x microscopic multiples.The data showed that4.5x images could calibrated with 2 pulse steps,that is,1?m platform travel,resulting in a maximum travel difference of-1.47?m,that is,the actual positioning accuracy was 1 pixel,corresponding to about 0.50?m.The 10-fold image can be calibrated with 1 pulse step,i.e.,a0.50?m platform travel,and the actual maximum travel difference is-0.220?m,i.e.,the actual positioning accuracy is 1 pixel,corresponding to about 0.25?m.At the end of the paper,the realization of the one-dimensional precision positioning platform and the deficiencies in the experiment are summarized,and the construction of the two-dimensional and the three-dimensional platform as well as the precision measurement of the three-dimensional precision positioning platform are prospected.