Research On Control Software For ITO Laser Precision Ablation System

In techniques of laser ablation, a one-time process is not enough for some sort of oversize ITO films and conductive silver pastes used in touch panels due to the limited scan field of F-Theta lens, which makes a joint inevitable between several processed workpieces, which is a challenge for laser ablation system.(1) According to the demand of ITO machining paths, taking DXF as a paths input, a set of methods have been designed to generate and optimize ITO processing paths. The simultaneous machining of ITO films and conductive silver pastes has been achieved by reserving machining paths in terms of layers, which has doubled the production efficiency.(2) The machining accuracy of laser ablation system depends on the positioning accuracy of workpieces and scanning precision. The position mapping has been completed with machine vision technology(the pixel size of the image sensor is only 2,2?m) and high precision X/Y stages(the positioning accuracy is 1?m) regarded as a ruler.(3) To meet the requirement of techniques of ITO ablation, an improved precise correction table method has been proposed to correct the distortion of galvanometers. Different from traditional open-loop control system, with the position feedback from camera to guide realtime interpolation, this method becomes a closed-loop correction system, which can finish the calibration in several minutes. The scanning accuracy can be better than 4?m and the scanning speed is beyond 5m/s while the step size is 20?m.(4) This ITO laser precision ablation system(ET650IR) studied by this article has applied to ablate ITO-films and conductive silver pastes used in mobile phones, tablets, digital cameras or vehicle navigations. The error of joints can be less than 15% while the linewidth does not exceed 40?m. The approximate average daily production can be ten thousand when ablating 5-inch screen, and the yield is almost 98%The research of this article makes contributions to ITO films ablation and is of reference value for controlling laser precision ablation system...