AlGaN/GaN HEMT Sensor Design,Production And Testing For Explosives Detection

Biochemical sensing technology with high sensitivity,miniaturization,integration,low cost and fast response charactristics,can provide technical support for environmental monitoring,food safety analysis,clinical diagnosis and biomedical research,etc.Therefore,this technology is of great importance and practical applications for building a well-off society,safeguarding life,health and improving the living standards of the nation.In this paper,we try to polish up the sensing mechanism and improve the performance of the sensor on the background of rapid application in the field of environmental trace monitoring by micro/nano sensors.For the first time,we put forward to developing research on TNT detection by "biological molecular film-gold nanoparticles" gate electrode AlGaN/GaN HEMT biochemical sensors to deal with high production cost of senors,the molecular recognition elements being fixed on the gate electrode and other problems which are caused by the existence of metal or oxide gate electrode in AlGaN/GaN high electron mobility transistor(HEMT).The main contents of this paper are organized as follows:(1)Introduing the detection background and existing detection methods of TNT,put forward ieda of designing AlGaN/HEMT senor on the basis of its excellent performance to detect the TNT.(2)Analysing the working principle of AlGaN/GaN HEMT sensor,designing and fabricating AlGaN/GaN HEMT sensor structure,production steps including lithography,etching,coating and other processes.(3)The surface modification of AlGaN/GaN HEMT sensor: the 3-mercaptopropyl triethoxysilane was used to link gold nanoparticles(Au NPs)chemically to enhance the signal response and then the gold particles were modified by cysteamine to complete the specific recognition of TNT.(4)The sensor can quickly response to TNT and shows excellent performance with quantitative range at ppt levels after modifying.Besides,the senor exhibits a good selectivity to TNT.