Study On The Droplet Microreactor System Based On Piezoelectric Film Bulk Acoustic Resonator

“Lab on a chip” has been extensively studied for decades,with the purpose of developing microsystem by fabricating tiny chips which can perform duties as traditional chemical and biological lab.Microscale reaction in a droplet represents one of the important topics in the development of “Lab on a chip”.In this thesis,we firstly developed a droplet microreactor with Solid Mounted Resonator(SMR)which is small in size,low power consumption,highly sensitive,and monolithic integratable.Then,wireless technology was introduced into the system and the resulting wireless droplet microreactor shows potentials for applications in specific environment like closed or confined space.The wireless technology realizes remote control of microscale chem/bio reaction,further reduces platform size,enhances portability and lessen the reliability on peripheral system interface.In addition,the realization of wireless microreactor will further simplify the design in microreactor array.Thus,it is meaningful to study integration of SMR based microreactor with wireless technology.The main content of thesis and contribution are summarized as following.Firstly,recent studies in microreactor were reviewed and a droplet microreactor system based on SMR is proposed.Secondly,recent studies in wireless technology for applications in “Lab on a chip” were reviewed and a droplet microreactor system based on wireless technology is proposed.Thirdly,SMR devices resonating at 2.45 GHz were designed and fabricated,and droplet microreactor based on the resonator is successfully prepared.On-chip heating,mixing and sensing in a droplet are demonstrated for the first time.Fourthly,the wireless controllable resonator is introduced into the microreactor system,and remote control of mixing and heating in droplets was realized.At the same time,the energy distribution in the wireless heating process is analyzed and calculated.Fifthly,two circuit structures,namely "H" type circuit and "rake" type circuit,are designed and fabricated for application in microreactor array.The circuit shows good performance in controlling uniform and gradient heating of droplets and has great potential in microreactor array for high-throughput bio/chemical reaction.