Design Of Flexible Pressure Sensor Based On Microstructure

With the development of the information society and the continuous advancement of the Internet of Things technology,the depth and breadth of information collection of surrounding environment has been continuously improved.Flexible pressure sensors have become more and more widely used as a very important information acquisition device.Very impressive.Not only that,this kind of device has brought revolutionary changes to many aspects of social life,and is widely used in the fields of robots,wearable electronic devices,h?man-computer interaction,etc.The research on flexible pressure sensors has also become a recent hot spot.Traditional devices are rigid pressure sensors that are not easy to wear and carry.However,the preparation method of the flexible pressure sensor is complicated,the cost is high,the sensitivity is low,and the fabrication of the sensor array is also a challenge.This study uses MEMS technology and is replaced by the flexible polymer material“polydimethylsiloxane”?PDMS?.A traditional rigid substrate for flexible capacitive pressure sensors.With a flexible material as the substrate,the capacitive pressure sensor can be used to increase the range of applications,because the overall structure of the sensor is flexible,and can be applied to various curved surfaces when applied to various curved surfaces.The insulating dielectric layer is PDMS,so that the initial capacitance value before and after deflection is not easily changed due to deflection.In this paper,the theoretical relationship between pressure and capacitance is derived,and the relationship between pressure and capacitance is obtained.The theoretical formula of pressure and capacitance is calculated by the formula derived from customs clearance.The cubic structure,triangular prism structure and sphere designed in this paper are used.The structural flexible pressure sensor is simulated and analyzed.The displacement of the spherical structure under the same pressure is the largest,but the displacement distribution of the spherical structure is not uniform.The concentrated central region is easy to break the parallel between the electrode plates.The displacement distribution of the other three structures is compared.The uniform displacement of the sensor with uniform triangular prism structure is not much different from that of the spherical structure,and it can ensure that the two plates are kept parallel under the action of pressure.The linearity of the triangular prism structure,the sphere structure,the cubic structure and the blank control are8.8%,7%,7.7%,and 0.09%,respectively.The linearity of the sensor under the triangular prism structure is the highest,followed by the cubic structure.The sensor sensitivity of the triangular prism structure,the sphere structure,the cubic structure and the blank control are 8.15(MPa^-1),6.5(MPa^-1),1.84(MPa^-1),0.12(MPa^-1),respectively,under the triangular prism structure.The sensitivity of the sensor is the highest,followed by the structure of the sphere.In s?mmary,the linearity and sensitivity of the triangular prism structure are the highest.It can be seen that the flexible pressure sensor with triangular prism structure has the best performance.